说明
SST531 280 50Wafer tested with DI-Water Levitronix Controller missing Details Attached配置
-Voltage 3x400V+N+PE 35A max -Dimension 2100x1087x1867mm LxWxH -3 Hetated, 2 Unheated Tanks -280er Chamber for 50 Wafers 8“ -Tank 1,2 was used for EKC 265, Tank 3,4 for IPA -Additional tank Nb. 5 for tests, equipped with a Fillvessel and Metering pump. T5 Supply by external CDA cabinet. -2xFume Sensors Bieler+Lang -5x Levitronix Pumps BSM 4.2 + LC325 -Rotor 50 Wafer for Clampshell -SECS GEMOEM 型号描述
未提供文件
SEMITOOL
SST531
类别
Spray Solvent / Acid
上次验证： 10 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
137243
晶圆尺寸：
未知
年份：
2012
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available