说明
无说明配置
SW_RELEASE 080806 MAGIC_STRING tkwMWFU0{UN WAFER_STEPPER OPTIONS SECS KEY g|VcVAw4iVk REFL_IMAGE_SENSOR KEY g|VcVAw0yVk PEP_1_PRODUCTIVITY_UPGRADE KEY C2hq5DExVjP PEP_2_PRODUCTIVITY_UPGRADE KEY E6ZxUltzzgj RETICLE_ERROR_COMPENSATION KEY ezPvMVMFY8K FLATNESS_MODEL KEY wRRhwXm4D8R LSQ_DISTO_MODEL KEY oxPhQhQj60R MARK_SENSOR KEY ElVc1Qr|e4h BATCH_STREAMING KEY xK4jj9z78Ul INTENSITY_2 KEY L{{4XJJOUks FOCUS_MONITORING KEY Vk80bFKFgFv FOCAL_ADJUSTMENT KEY xK49L3zFwUl EXTENDED_EXPOSURE KEY x05F|7w29Vl FAST_TTL_ALIGNMENT KEY s5kl|kb8cIv PEP_LEVEL_ALIGNMENT_1 KEY 6lKCIhPxpyB PEP_WAFER_SWAP_4 KEY tHxoZuAW3VXOEM 型号描述
Designed for mass production at 0.4 µm and achieves extremely high throughout while maintaining versatility with its variable Numerical Aperture (NA). This stepper extends i-line’s capability for manufacturing multiple generations of subhalf-micron design rules by optimizing both depth of focus and resolution for critical process layers. NA:0.60文件
无文件
ASML
PAS 5500/100D
已验证
类别
Steppers & Scanners
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
111837
晶圆尺寸：
6"/150mm
年份：
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ASML
PAS 5500/100D
类别
Steppers & Scanners
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
111837
晶圆尺寸：
6"/150mm
年份：
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
SW_RELEASE 080806 MAGIC_STRING tkwMWFU0{UN WAFER_STEPPER OPTIONS SECS KEY g|VcVAw4iVk REFL_IMAGE_SENSOR KEY g|VcVAw0yVk PEP_1_PRODUCTIVITY_UPGRADE KEY C2hq5DExVjP PEP_2_PRODUCTIVITY_UPGRADE KEY E6ZxUltzzgj RETICLE_ERROR_COMPENSATION KEY ezPvMVMFY8K FLATNESS_MODEL KEY wRRhwXm4D8R LSQ_DISTO_MODEL KEY oxPhQhQj60R MARK_SENSOR KEY ElVc1Qr|e4h BATCH_STREAMING KEY xK4jj9z78Ul INTENSITY_2 KEY L{{4XJJOUks FOCUS_MONITORING KEY Vk80bFKFgFv FOCAL_ADJUSTMENT KEY xK49L3zFwUl EXTENDED_EXPOSURE KEY x05F|7w29Vl FAST_TTL_ALIGNMENT KEY s5kl|kb8cIv PEP_LEVEL_ALIGNMENT_1 KEY 6lKCIhPxpyB PEP_WAFER_SWAP_4 KEY tHxoZuAW3VXOEM 型号描述
Designed for mass production at 0.4 µm and achieves extremely high throughout while maintaining versatility with its variable Numerical Aperture (NA). This stepper extends i-line’s capability for manufacturing multiple generations of subhalf-micron design rules by optimizing both depth of focus and resolution for critical process layers. NA:0.60文件
无文件