说明
无说明配置
8/28/21 - Qpm 11/4/2021 - Apm 2/7/2022 - Qpm R/B Disto: NCE X (nm) 46.5 45.7 46.2 NCE Y (nm) 45.6 51.9 56.3 Focal: Focus (nm) -0.102 0.025 0.048 Rx (urad) -4.707 5.964 0.877 Ry (urad) 4.847 -3.871 1.188 FPD (um) 0.319 0.313 0.333 Astig (um) 0.267 0.291 0.302 Illumination: Uniformity: (%) 1.19% @ 932 1.15% @ 897 1.07% @ 991 Straylight: (%) 4.29% 4.32% 4.27% FILE_TYPE 03 MACHINE_TYPE /100 COMMENT TZ=factory SW_RELEASE 080900 MAGIC_STRING Nkk6WFU0{Ud WAFER_STEPPER OPTIONS REFL_IMAGE_SENSOR KEY F0yLW1u|SL| ARMS KEY pS4GaZvznx{ PEP_1_PRODUCTIVITY_UPGRADE KEY b1TEwVDpCIh PEP_2_PRODUCTIVITY_UPGRADE KEY 4fp{lpSzgDE RETICLE_ERROR_COMPENSATION KEY ezPz6VMFY8K LSQ_DISTO_MODEL KEY UXGjaAJQxRx MARK_SENSOR KEY ElVc1Qr|e6Z BATCH_STREAMING KEY clTcB0{qkKB INTENSITY_2 KEY H|w4XNMDFgs FAST_TTL_ALIGNMENT KEY knvzCZ4n5Ad THREE_INCH_WAFER KEY Ri49{AJfvxl PEP_LEVEL_ALIGNMENT_1 KEY R94FykGXvxl PEP_WAFER_SWAP_4 KEY VpvuZu0eZN1 SCRIBELANE_MARKS KEY sJukj{zYm1U LIBRARY_CONFIG_3 KEY zcHKXcHWkvw VISUAL_ALIGNMENT_CAMERA KEY 4{lw|||DgJIOEM 型号描述
Designed for mass production at 0.4 µm and achieves extremely high throughout while maintaining versatility with its variable Numerical Aperture (NA). This stepper extends i-line’s capability for manufacturing multiple generations of subhalf-micron design rules by optimizing both depth of focus and resolution for critical process layers. NA:0.60文件
类别
Steppers & Scanners
上次验证： 25 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
128505
晶圆尺寸：
6"/150mm
年份：
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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PAS 5500/100D
类别
Steppers & Scanners
上次验证： 25 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
128505
晶圆尺寸：
6"/150mm
年份：
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available