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Z-spin UP SCAN 0.1505 Down SCAN 0.1678 Distortion UP SCAN MAX_X 20.8 MAX_Y 17.6 MIN_X -24 MIN_Y -14 Distortion Down SCAN MAX_X 22.4 MAX_Y 13.6 MIN_X -23.2 MIN_Y -17.1 U% X_position 5.4 Y_position 3.07OEM 型号描述
The FPA-6000AS4 is an ArF scanner that is the industry’s fastest and has the highest NA (0.85). It can project features as small as 85nm and is built on Canon’s new 140-wph, F2-capable FPA-6000 single-stage platform. It provides a cost-optimized solution for high volume 300mm or 200mm exposure processes for leading-edge device manufacturers choosing a mix-and-match strategy. The scanner has a 0.85-NA, 4:1 reduction lens system and is capable of 85-nanometer resolution with an overlay precision of 18nm.文件
类别
Steppers & Scanners
上次验证： 21 天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
116428
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CANON
FPA-6000AS4
类别
Steppers & Scanners
上次验证： 21 天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
116428
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available