说明
248nm (KrF) Scanner配置
无配置OEM 型号描述
"This step-and-scan system comes with a single stage lithography tool and 0.86 NA. It comes with NA KrF lens with 90nm. The Canon FPA-6000 ES6 can be configured for 200mm or 300mm wafers. Throughput for 300mm is ≥100wph (300mm,122shots) and for 200mm is ≥ 170wph."文件
无文件
CANON
FPA-6000ES6
已验证
类别
Steppers & Scanners
上次验证： 3 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
94584
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CANON
FPA-6000ES6
类别
Steppers & Scanners
上次验证： 3 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
94584
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
248nm (KrF) Scanner配置
无配置OEM 型号描述
"This step-and-scan system comes with a single stage lithography tool and 0.86 NA. It comes with NA KrF lens with 90nm. The Canon FPA-6000 ES6 can be configured for 200mm or 300mm wafers. Throughput for 300mm is ≥100wph (300mm,122shots) and for 200mm is ≥ 170wph."文件
无文件