说明
无说明配置
无配置OEM 型号描述
"This step-and-scan system comes with a single stage lithography tool and 0.86 NA. It comes with NA KrF lens with 90nm. The Canon FPA-6000 ES6 can be configured for 200mm or 300mm wafers. Throughput for 300mm is ≥100wph (300mm,122shots) and for 200mm is ≥ 170wph."文件
无文件
类别
Steppers & Scanners
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
99963
晶圆尺寸：
12"/300mm
年份：
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CANON
FPA-6000ES6
类别
Steppers & Scanners
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
99963
晶圆尺寸：
12"/300mm
年份：
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
无配置OEM 型号描述
"This step-and-scan system comes with a single stage lithography tool and 0.86 NA. It comes with NA KrF lens with 90nm. The Canon FPA-6000 ES6 can be configured for 200mm or 300mm wafers. Throughput for 300mm is ≥100wph (300mm,122shots) and for 200mm is ≥ 170wph."文件
无文件