说明
i-LINE配置
STEPPEROEM 型号描述
Resolution: ≦ 500 nm NA (Numerical Aperture): 0.37~0.28 (Variable) Reduction Ratio1:2 Field Size: 52 mm (max) x 56 mm (max) (Φ70.7 mm inside) Exposure Wavelength: i-line 365 nm Reticle Size: 6 inch Wafer Size: 200 mm (8 inch), 300 mm (12 inch) (Selection)文件
无文件
类别
Steppers & Scanners
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
83622
晶圆尺寸：
12"/300mm
年份：
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CANON
FPA-5510iX
类别
Steppers & Scanners
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
83622
晶圆尺寸：
12"/300mm
年份：
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
i-LINE配置
STEPPEROEM 型号描述
Resolution: ≦ 500 nm NA (Numerical Aperture): 0.37~0.28 (Variable) Reduction Ratio1:2 Field Size: 52 mm (max) x 56 mm (max) (Φ70.7 mm inside) Exposure Wavelength: i-line 365 nm Reticle Size: 6 inch Wafer Size: 200 mm (8 inch), 300 mm (12 inch) (Selection)文件
无文件