说明
Lens Data IU Flare = 0.84% Lens Flare = 8.50% Uniformity = 6.00% Power = 541 mW/cm2 Total Focus Deviation = 0.202 µm Astigmatism = 0.119 µm Coma = 0.040 µm Iso DOF = .275 µm Photolithography Scanner 248nm Software Version - MCSV CIM - SECS Excluded Items List (Pumps, Chillers & Abatement are all excluded)配置
Handler System: WL Type 3 Factory Interface: Open CassetteOEM 型号描述
Stepper. NSR-S203B (resolution ≦ 180 nm). Ability to mass manufacture ICs with ultra-high-precision circuitry–specifically, sub-0.18µm minimum-pattern linewidth.文件
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NIKON
NSR-S203B
类别
Steppers & Scanners
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
133519
晶圆尺寸：
8"/200mm
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available