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说明
I-line Stepper配置
280nm, I-Line StepperOEM 型号描述
i-line Steppers Throughput: ≧ 100 wafers/hour (300 mm wafer), ≧ 120 wafers/hour (200 mm wafer). NSR-SF140 (resolution ≦ 280 nm).文件
无文件
NIKON
NSR-SF140
类别
Steppers & Scanners
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
91052
晶圆尺寸：
12"/300mm
年份：
2005
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说明
I-line Stepper配置
280nm, I-Line StepperOEM 型号描述
i-line Steppers Throughput: ≧ 100 wafers/hour (300 mm wafer), ≧ 120 wafers/hour (200 mm wafer). NSR-SF140 (resolution ≦ 280 nm).文件
无文件