说明
无说明配置
1． Reticle size and RL type information；SMIF-OHT 2． Whether have LSA/FIA/LIA function； FIA 3． WL size and wafer loader type information；WL type3 4． Wafer Cassette numbers；1unit 5． Wafer Inline position； from Inline 6． Wafer PRE-Align Type; NC pre2 7. SF140 current condition ? In production? Idle? up production 8． Any missing parts or damaged parts? No missing parts 2) Recent tool performance data of SF140（Power、uniformity、Dis、INC、Stepping、Focus、LSA-FiA OVL、Flatness 、Resolution etc.) FlatnessOEM 型号描述
i-line Steppers Throughput: ≧ 100 wafers/hour (300 mm wafer), ≧ 120 wafers/hour (200 mm wafer). NSR-SF140 (resolution ≦ 280 nm).文件
无文件
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NIKON
NSR-SF140
类别
Steppers & Scanners
上次验证： 4 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
147412
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
1． Reticle size and RL type information；SMIF-OHT 2． Whether have LSA/FIA/LIA function； FIA 3． WL size and wafer loader type information；WL type3 4． Wafer Cassette numbers；1unit 5． Wafer Inline position； from Inline 6． Wafer PRE-Align Type; NC pre2 7. SF140 current condition ? In production? Idle? up production 8． Any missing parts or damaged parts? No missing parts 2) Recent tool performance data of SF140（Power、uniformity、Dis、INC、Stepping、Focus、LSA-FiA OVL、Flatness 、Resolution etc.) FlatnessOEM 型号描述
i-line Steppers Throughput: ≧ 100 wafers/hour (300 mm wafer), ≧ 120 wafers/hour (200 mm wafer). NSR-SF140 (resolution ≦ 280 nm).文件
无文件