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说明
无说明配置
Laser system: KOMATSU Resolution: 0.18um Wafer loader type: type 3, NC Pre2 Reticle size: 6 inch Max expose field size: 26mm X 33mm Reticle library: Nikon Standard (9Slot) PPD: Yes Bar code reader: Yes Alignment system: LSA, FIA Inline: Left in-line Chamber type: S61OEM 型号描述
Throughput: ≧ 110 wafers/hour (300 mm wafer) ≧ 120 wafers/hour (200 mm wafer)文件
无文件
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NIKON
NSR-SF200
类别
Steppers & Scanners
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
53557
晶圆尺寸：
8"/200mm
年份：
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Laser system: KOMATSU Resolution: 0.18um Wafer loader type: type 3, NC Pre2 Reticle size: 6 inch Max expose field size: 26mm X 33mm Reticle library: Nikon Standard (9Slot) PPD: Yes Bar code reader: Yes Alignment system: LSA, FIA Inline: Left in-line Chamber type: S61OEM 型号描述
Throughput: ≧ 110 wafers/hour (300 mm wafer) ≧ 120 wafers/hour (200 mm wafer)文件
无文件