FORM FACTOR / CASCADE MICROTECH / FRT MICROPROF 200

说明

XY-Table: 250 mm x 200mm travel range with a pneumatic brake. Base: Granite base plate on air-damping elements with vibration damping and level regulation. Sensors: Motorized linear axis for sensor approach (min. 50 mm travel). Hardware/Software: Includes video observation (LED), housing, monitor arm, measurement PC, and acquisition/image analysis software. Tilting Table: Two-axis tilting table with a specific hole pattern. Sensors and Objectives- Surface Sensor: Combined Confocal Microscope (CFM) and White Light Interferometer (WLI) with a 6-position objective nosepiece. NIR Thin Film Sensor: Spectrometer for the 900–1700 nm spectral range, capable of measuring up to 10 layers (including 2 substrate layers) and accounting for interface roughness. Objective Specifications: | Objective | Type | Vert. Resolution | Lat. Resolution | Field of View | | :--- | :--- | :--- | :--- | :--- | | 20x CFM | Confocal | 3 nm | 1.16 µm | 890 x 655 µm | | 50x CFM | Confocal | 2 nm | 0.42 µm | 356 x 267 µm | | 100x CFM | Confocal | 1 nm | 0.37 µm | 178 x 134 µm | | 50x WLI | Mirau | 0.1 nm | 0.61 µm | 356 x 267 µm |

配置

MicroProf 200: The main base unit. HRP Package: High-resolution package. Tilting Table 200: For sample positioning. CFM DT Area Sensor: Confocal Film Microscope sensor. Lenses: 20x, 50x, and 100x objectives for CFM; 50x objective for WLI (White Light Interferometry). FRT FTR Thin Film Sensor: Type NIR (Near-Infrared). Software: n&k software and Mark III additional license.