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说明
Metal Film thickness measurement配置
• Currently Configured for 300mm wafer sizes • Install Type: Stand-Alone • Cassette Interface: o (2) Brooks Fixload-6 300mm FOUP load-ports • 25-Slot FOUPs • Pre-A ligner (Flat/Notch Finder) • Status Lamp (R/Y/G/B) • Ultrafast Laser Output (Ti Sapphire): 800nm @300mW, PW=100x10e-15sec. • Diode Pump Laser Power: 2W • GEM / SECS II • 3.5" ( 1.44MB) Floppy Drive • CD-RW Drive • 2GB Jazz Drive (Backup) • Chiller Unit: o Lytron RC006G03B2C015 • Power Requirements: 220VAC (4900VA), single Phase, Freq 50/60HzOEM 型号描述
MetaPULSE 300 incorporates all of the features of our MetaPULSE 200 system and is configured to measure 300 millimeter product wafers.文件
无文件
类别
Thin Film / Film Thickness
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
74790
晶圆尺寸：
12"/300mm
年份：
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ONTO / RUDOLPH / AUGUST
MetaPULSE 300
类别
Thin Film / Film Thickness
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
74790
晶圆尺寸：
12"/300mm
年份：
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Metal Film thickness measurement配置
• Currently Configured for 300mm wafer sizes • Install Type: Stand-Alone • Cassette Interface: o (2) Brooks Fixload-6 300mm FOUP load-ports • 25-Slot FOUPs • Pre-A ligner (Flat/Notch Finder) • Status Lamp (R/Y/G/B) • Ultrafast Laser Output (Ti Sapphire): 800nm @300mW, PW=100x10e-15sec. • Diode Pump Laser Power: 2W • GEM / SECS II • 3.5" ( 1.44MB) Floppy Drive • CD-RW Drive • 2GB Jazz Drive (Backup) • Chiller Unit: o Lytron RC006G03B2C015 • Power Requirements: 220VAC (4900VA), single Phase, Freq 50/60HzOEM 型号描述
MetaPULSE 300 incorporates all of the features of our MetaPULSE 200 system and is configured to measure 300 millimeter product wafers.文件
无文件