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BROOKS AUTOMATION JET
    说明
    Equipment Front End Module (EFEM) with two load ports. The EFEM is designed for manual, Automated Guided Vehicles (AGV), or Over Head Transport (OHT) loading of FOUPs or cassettes that contain wafers waiting to be processed in the process modules. The wafers are removed from FOUPs or casettes by the atmospheric robot in the EFEM aligned, and moved by the atmospheric robot to the Vacuum Back End Load Locks. Inside the EFEM is an enclosed area with an air flow to prevent particles from depositing on the wafer. Inside this area, referred to as the minienvironment, the atmospheric robot moves wafers from inside FOUPs and cassettes. The Vision Load Port Module attaches to the front openings or bays. The Razor™ Atmospheric Transfer Robot (ATR) moves the wafers between the Load Port Modules, Aligner, and Load Ports. The robot provides up to five axes of motion allowing off-center material pick and place and fast material swap. The end effectors available offer passive support, an active edge-grip, or a vacuum grip for high operating speeds.
    配置
    Brooks Gemini II (included) -2 Vision load port modules, -Razor ATR Atmospheric Robot and Fusion Controller, -Aligner
    OEM 型号描述
    The Brooks Automation Jet system is an Equipment Front End Module or EFEM. It is the link between the factory’s Material Transport System and the Process Tool.
    文件

    BROOKS AUTOMATION

    JET

    verified-listing-icon

    已验证

    类别
    Wafer Handling

    上次验证: 60 多天前

    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    81687


    晶圆尺寸:

    12"/300mm


    年份:

    2015


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    类似上架物品
    查看全部
    BROOKS AUTOMATION JET

    BROOKS AUTOMATION

    JET

    Wafer Handling
    年份: 2015状况: 二手
    上次验证60 多天前

    BROOKS AUTOMATION

    JET

    verified-listing-icon
    已验证
    类别
    Wafer Handling
    上次验证: 60 多天前
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/ba902619dc7a4f6e83a4123ab2342a80_picture2_mw.png
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/81899f55aeaf45229d67d6a5d6539687_picture1_mw.png
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    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/fa5d03b6c531483483c3d589284d8ce4_d9fb5e7074be460e879241a2bdcacf41_mw.jpeg
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    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/5c77cd1e49da4657b48b823269eb8c95_79b4d1a283434e779cace51fbcd00972_mw.jpeg
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/5f60806a9e504c589b1b675ee4105ee5_eeab3e1bdee7452c9dee8582a0ce559e_mw.png
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/6718acd3d95148cab0ec102d5011cca5_e1809d06cf524bafa263fb237faa321b1201a_mw.jpeg
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/c9b1791a7dd34727a83fc755a843b9fb_e883ced8957b4306b639a95212572f941201a_mw.jpeg
    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    81687


    晶圆尺寸:

    12"/300mm


    年份:

    2015


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    说明
    Equipment Front End Module (EFEM) with two load ports. The EFEM is designed for manual, Automated Guided Vehicles (AGV), or Over Head Transport (OHT) loading of FOUPs or cassettes that contain wafers waiting to be processed in the process modules. The wafers are removed from FOUPs or casettes by the atmospheric robot in the EFEM aligned, and moved by the atmospheric robot to the Vacuum Back End Load Locks. Inside the EFEM is an enclosed area with an air flow to prevent particles from depositing on the wafer. Inside this area, referred to as the minienvironment, the atmospheric robot moves wafers from inside FOUPs and cassettes. The Vision Load Port Module attaches to the front openings or bays. The Razor™ Atmospheric Transfer Robot (ATR) moves the wafers between the Load Port Modules, Aligner, and Load Ports. The robot provides up to five axes of motion allowing off-center material pick and place and fast material swap. The end effectors available offer passive support, an active edge-grip, or a vacuum grip for high operating speeds.
    配置
    Brooks Gemini II (included) -2 Vision load port modules, -Razor ATR Atmospheric Robot and Fusion Controller, -Aligner
    OEM 型号描述
    The Brooks Automation Jet system is an Equipment Front End Module or EFEM. It is the link between the factory’s Material Transport System and the Process Tool.
    文件
    类似上架物品
    查看全部
    BROOKS AUTOMATION JET

    BROOKS AUTOMATION

    JET

    Wafer Handling年份: 2015状况: 二手上次验证:60 多天前
    BROOKS AUTOMATION JET

    BROOKS AUTOMATION

    JET

    Wafer Handling年份: 0状况: 二手上次验证:60 多天前
    BROOKS AUTOMATION JET

    BROOKS AUTOMATION

    JET

    Wafer Handling年份: 0状况: 二手上次验证:60 多天前