说明
Chemical Mechanical Polisher配置
POWER: 208, 380, 460 Vac, 3 phase, 50/60 Hz DI WATER: Peak Flow: 12 gallons per minute (gpm) (45.4 I/m, Average Flow: 6 gpm (22.7 1/min), Pressure: 25 to 30 psi, minimum CHILLED WATER: Peak Flow: 5 gpm (18.9 l/min) COMPRESSED AIR: Peak Flow: 6 standard cubic feet per minute (SCFN) (170 SLM) NITROGEN: Peak Flow 10 SCFM (283 SLM) DIMENSIONS SPECIFICATION: Width: 207.62 in (5273.55 mm Depth: 131.74 in (3346.20 mm Height: 92.0 in (2336.8 mm Weight: Approximately 7500 Ibs. (3410 Kg)OEM 型号描述
The IPEC 472 wafer polisher is a fully automated, precision tool for CMP polishing of semiconductor wafers used to achieve flatness, uniformity, and planarization on patterned/device wafers. The 472 features automatic wafer handling and is capable of two platen, two-step polishing processing to maximize wafer throughput capability and quality. Designed to planarize wafers from 100mm to 200mm, the 472 is ideally suited for materials polishing applications that require repeatability with operational and processing flexibility.文件
IPEC / WESTECH
AVANTI 472
已验证
类别
Wafer Polishing
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
19761
晶圆尺寸：
4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
类似上架物品
查看全部
IPEC / WESTECH
AVANTI 472
类别
Wafer Polishing
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
19761
晶圆尺寸：
4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available