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AKRION GAMA
    说明
    Tool is set up to run 8" and 12". The faith transfer system is set up for both sizes as well. Ozone generator is the only mentionable missing part. There may be some minor fittings and things along those lines. All other major components are included, some listed below after double confirming. Dryer is intact Robot intact Freight transfer system intact Control module intact Dual tanks intact Water heaters intact *Megasonics - have not been used in a while, they typically have to be replaced anyway so this shouldn't be an issue.
    配置
    Process - SC1, HF, O3 2 process tanks and a Yield up dryer Process is insitu, using SC1 and then HF/ozone, but this can be modified The ozone module is no longer part of the tool. 200/300mm I-clean gama with cassette less process.
    OEM 型号描述
    The AKRION GAMA is a series of automated wet stations that are flexible and modular. They are suitable for a wide variety of cleaning, etching and stripping applications for bare and reclaimed silicon wafers, IC devices, MEMS and photomasks. The GAMA series is designed to provide high throughput and precision cleaning for semiconductor manufacturing processes.
    文件

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    verified-listing-icon

    已验证

    类别
    Wet Benches - Auto

    上次验证: 60 多天前

    物品主要详细信息

    状况:

    Used


    运行状况:

    Deinstalled / Uncrated


    产品编号:

    39987


    晶圆尺寸:

    未知


    年份:

    2007


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available

    AKRION

    GAMA

    verified-listing-icon
    已验证
    类别
    Wet Benches - Auto
    上次验证: 60 多天前
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    物品主要详细信息

    状况:

    Used


    运行状况:

    Deinstalled / Uncrated


    产品编号:

    39987


    晶圆尺寸:

    未知


    年份:

    2007


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    说明
    Tool is set up to run 8" and 12". The faith transfer system is set up for both sizes as well. Ozone generator is the only mentionable missing part. There may be some minor fittings and things along those lines. All other major components are included, some listed below after double confirming. Dryer is intact Robot intact Freight transfer system intact Control module intact Dual tanks intact Water heaters intact *Megasonics - have not been used in a while, they typically have to be replaced anyway so this shouldn't be an issue.
    配置
    Process - SC1, HF, O3 2 process tanks and a Yield up dryer Process is insitu, using SC1 and then HF/ozone, but this can be modified The ozone module is no longer part of the tool. 200/300mm I-clean gama with cassette less process.
    OEM 型号描述
    The AKRION GAMA is a series of automated wet stations that are flexible and modular. They are suitable for a wide variety of cleaning, etching and stripping applications for bare and reclaimed silicon wafers, IC devices, MEMS and photomasks. The GAMA series is designed to provide high throughput and precision cleaning for semiconductor manufacturing processes.
    文件

    无文件