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说明
Batch Wafer Processing配置
无配置OEM 型号描述
V3 Compact Batch Immersion System offering either dry-to-dry or dry-to-wet processing with low exhaust requirements, few facility connections and easy maintenance access, while maintaining as much as a 20 percent footprint reduction over comparable tool sets. The V3 robot is designed to accommodate 150 mm or 200 mm wafers in standard cassettes for IC devices; alternate cassettes allow other materials to be processed using the standard robot arm. Suitable for R&D labs and applications.文件
无文件
AKRION
V3
类别
Wet Benches - Auto
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
119570
晶圆尺寸：
8"/200mm
年份：
未知
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Money Back Guarantee
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Refurbishment Services
Available
说明
Batch Wafer Processing配置
无配置OEM 型号描述
V3 Compact Batch Immersion System offering either dry-to-dry or dry-to-wet processing with low exhaust requirements, few facility connections and easy maintenance access, while maintaining as much as a 20 percent footprint reduction over comparable tool sets. The V3 robot is designed to accommodate 150 mm or 200 mm wafers in standard cassettes for IC devices; alternate cassettes allow other materials to be processed using the standard robot arm. Suitable for R&D labs and applications.文件
无文件