说明
无说明配置
AKRION Rearmount - Wetbench Application: polymer removal Process flow: EKC, IPA, DI Front- or rear-mount: rear Process Robot End-Effector: Controller: control zone main components pneumatic solenoid panel, heated tank control unit, digital I/O boards (OPTO22) Transfer robot: robot transfer arm, free standing unit Common I/O Station: separate Wafer transfer system: NA Dual buffer queues: PFA Cassettes: Quartz carriers Configuration of each wet process modules: Tank 1: Static tank EKC Tank 4 Recirc tank EKC Tank 2,3: IPA Tank 5 DI tank Vapor dryer with IPA Pumps: SECS: Yes Software: DOS Operating system: 386 computer/AkrionOEM 型号描述
未提供文件
无文件
AKRION
REARMOUNT
类别
Wet Benches - Auto
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
132894
晶圆尺寸：
6"/150mm
年份：
1992
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
AKRION Rearmount - Wetbench Application: polymer removal Process flow: EKC, IPA, DI Front- or rear-mount: rear Process Robot End-Effector: Controller: control zone main components pneumatic solenoid panel, heated tank control unit, digital I/O boards (OPTO22) Transfer robot: robot transfer arm, free standing unit Common I/O Station: separate Wafer transfer system: NA Dual buffer queues: PFA Cassettes: Quartz carriers Configuration of each wet process modules: Tank 1: Static tank EKC Tank 4 Recirc tank EKC Tank 2,3: IPA Tank 5 DI tank Vapor dryer with IPA Pumps: SECS: Yes Software: DOS Operating system: 386 computer/AkrionOEM 型号描述
未提供文件
无文件