说明
无说明配置
AKRION Rearmount - Wetbench Application: etching Process flow: HF, HNO3, NH4F, IPA, DIW Front- or rear-mount: rear Process Robot End-Effector: Controller: control zone main components pneumatic solenoid panel, heated tank control unit, digital I/O boards (OPTO22) Transfer robot: robot transfer arm, free standing unit Common I/O Station: separate Wafer transfer system: No Dual buffer queues: PFA Cassettes: yes Configuration of each wet process modules: Tank1: HF Tank3: HNO3, HF and DI-water Tank5: HF + NH4F Tank7: HF Vapor dryer: IPA Pumps: SECS: yesOEM 型号描述
未提供文件
无文件
AKRION
REARMOUNT
类别
Wet Benches - Auto
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
132896
晶圆尺寸：
6"/150mm
年份：
1992
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
AKRION Rearmount - Wetbench Application: etching Process flow: HF, HNO3, NH4F, IPA, DIW Front- or rear-mount: rear Process Robot End-Effector: Controller: control zone main components pneumatic solenoid panel, heated tank control unit, digital I/O boards (OPTO22) Transfer robot: robot transfer arm, free standing unit Common I/O Station: separate Wafer transfer system: No Dual buffer queues: PFA Cassettes: yes Configuration of each wet process modules: Tank1: HF Tank3: HNO3, HF and DI-water Tank5: HF + NH4F Tank7: HF Vapor dryer: IPA Pumps: SECS: yesOEM 型号描述
未提供文件
无文件