说明
GaN SEZ配置
无配置OEM 型号描述
The SEZ 4200 is a single wafer processing system that combines SEZ’s process capability with high throughput and reliability. It uses a dual arm robot to transport 200mm wafers from four cassettes to four process chambers, using one media for all chambers. The media can be recycled, heated, and filtered within the system or used in single pass mode. The system has an object-oriented software architecture with a Sematech compliant GUI and touch screen for easy operation. It has a cost-effective throughput/footprint ratio and competitive CoO. Options like Endpoint Detection System, ozone processing, and SMIF ensure application solutions that meet and exceed customer needs. Supported applications include polymer removal, metal pre-clean, and layer stripping.文件
无文件
类别
Wet Etch
上次验证： 25 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
151455
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH / SEZ
SP4200
类别
Wet Etch
上次验证： 25 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
151455
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
GaN SEZ配置
无配置OEM 型号描述
The SEZ 4200 is a single wafer processing system that combines SEZ’s process capability with high throughput and reliability. It uses a dual arm robot to transport 200mm wafers from four cassettes to four process chambers, using one media for all chambers. The media can be recycled, heated, and filtered within the system or used in single pass mode. The system has an object-oriented software architecture with a Sematech compliant GUI and touch screen for easy operation. It has a cost-effective throughput/footprint ratio and competitive CoO. Options like Endpoint Detection System, ozone processing, and SMIF ensure application solutions that meet and exceed customer needs. Supported applications include polymer removal, metal pre-clean, and layer stripping.文件
无文件