说明
Stripper/Asher配置
PROCESS MODULE,2130,GAMMA,CORE · MOTOR ASSY, UPLA FILTER, GAMMA 300MM · ULPA FLTR ASSY,24 X 48 INCH,W 2 PREFLTR · ASSY,PROCESS CHAMBER · ASSY,LOAD LOCK LEFT,TOP PURGE · ASSY,LOADLOCK,RIGHT,TOP PURGE · KIT,ATM ROBOT,GAMMA 2130 · KIT,34-172011 RELAY,MAIN CNTRLR,G2130,12 · ASSY,CONTROLLER,CHAMBER LIFT,GAMMA 300MM · KIT,VACUUM PLUMBING PROCESS CHAMBER · GAS PLMBG KIT, LL VACUUM/FORELINE · GAS PLMBG KIT,GSBX-CHMBR,PURGE,2130 · KIT,RF GEN,MODEL AX-2000III-A-NV1,G2130 · LPB,5 STA,W/O PUMPS,W/FANS · ASSY,GUIDE ASSY,LEFT FRONT, CHAMBER LIFT · ASSY,GUIDE ASSY,LEFT REAR, CHAMBER LIFT, · ASSY,GUIDE ASSY,RIGHT FRONT, CHAMBER LIF · ASSY,GUIDE ASSY,RIGHT REAR, CHAMBER LIFT · ASSY,LIFT ROT SNSR · ASSY,BEMC 8 AXIS,FW V4.09,G2130 · KIT,PROTEUS,2130 · KIT,S/W,GAMMA(2130) V3.70 B24 (Subject to Change) FOUP LOADER,G2130 · LOADER,FOUP,SIG STD CONFIG W/HERMOS,6M REAR DISPLAY,G2130 · ARM,PC SWING, GAMMA 2130 · BRKT,MONITOR SUPPORT PC · DISPLAY,15 INCH W/TOUCHSCREEN · ACTR,SWITCH,PUSHBUTTON, EMO · ADPTR, DUAL MONITOR BLANK OFF, LIGHT TOWER GASBOX,02,N2,FG,CF4,GAMMA 2130 · ASSY,ENCLOSURE ASSY,GAS MODULE, 4 GAS,GA · KIT,OPTIONAL GAS LINE, N2/H2,GAMMA 300MM · GAMMA 2130 GAS BOX ,4 CHANNEL STD, AERA · MFC,AERA 781OCD,20SLM O2, 9PD · MFC,AERA 7800CD,4SLM N2, 9PD · KIT,OPTIONAL ,GASLINE, CF4OEM 型号描述
The GAMMA 2130 system is a front-end-of-line (FEOL) photoresist strip system for 300mm wafers. Our multi-station sequential processing architecture incorporates six stations within a single process chamber, enabling a 30 percent higher throughput rate when compared to that of the closest competitor.文件
无文件
类别
Ashers / Plasma Cleaner
上次验证： 7 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
135505
晶圆尺寸：
12"/300mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / NOVELLUS / GASONICS
GAMMA 2130
类别
Ashers / Plasma Cleaner
上次验证： 7 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
135505
晶圆尺寸：
12"/300mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Stripper/Asher配置
PROCESS MODULE,2130,GAMMA,CORE · MOTOR ASSY, UPLA FILTER, GAMMA 300MM · ULPA FLTR ASSY,24 X 48 INCH,W 2 PREFLTR · ASSY,PROCESS CHAMBER · ASSY,LOAD LOCK LEFT,TOP PURGE · ASSY,LOADLOCK,RIGHT,TOP PURGE · KIT,ATM ROBOT,GAMMA 2130 · KIT,34-172011 RELAY,MAIN CNTRLR,G2130,12 · ASSY,CONTROLLER,CHAMBER LIFT,GAMMA 300MM · KIT,VACUUM PLUMBING PROCESS CHAMBER · GAS PLMBG KIT, LL VACUUM/FORELINE · GAS PLMBG KIT,GSBX-CHMBR,PURGE,2130 · KIT,RF GEN,MODEL AX-2000III-A-NV1,G2130 · LPB,5 STA,W/O PUMPS,W/FANS · ASSY,GUIDE ASSY,LEFT FRONT, CHAMBER LIFT · ASSY,GUIDE ASSY,LEFT REAR, CHAMBER LIFT, · ASSY,GUIDE ASSY,RIGHT FRONT, CHAMBER LIF · ASSY,GUIDE ASSY,RIGHT REAR, CHAMBER LIFT · ASSY,LIFT ROT SNSR · ASSY,BEMC 8 AXIS,FW V4.09,G2130 · KIT,PROTEUS,2130 · KIT,S/W,GAMMA(2130) V3.70 B24 (Subject to Change) FOUP LOADER,G2130 · LOADER,FOUP,SIG STD CONFIG W/HERMOS,6M REAR DISPLAY,G2130 · ARM,PC SWING, GAMMA 2130 · BRKT,MONITOR SUPPORT PC · DISPLAY,15 INCH W/TOUCHSCREEN · ACTR,SWITCH,PUSHBUTTON, EMO · ADPTR, DUAL MONITOR BLANK OFF, LIGHT TOWER GASBOX,02,N2,FG,CF4,GAMMA 2130 · ASSY,ENCLOSURE ASSY,GAS MODULE, 4 GAS,GA · KIT,OPTIONAL GAS LINE, N2/H2,GAMMA 300MM · GAMMA 2130 GAS BOX ,4 CHANNEL STD, AERA · MFC,AERA 781OCD,20SLM O2, 9PD · MFC,AERA 7800CD,4SLM N2, 9PD · KIT,OPTIONAL ,GASLINE, CF4OEM 型号描述
The GAMMA 2130 system is a front-end-of-line (FEOL) photoresist strip system for 300mm wafers. Our multi-station sequential processing architecture incorporates six stations within a single process chamber, enabling a 30 percent higher throughput rate when compared to that of the closest competitor.文件
无文件