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说明
Hitachi CG4100 tool配置
无配置OEM 型号描述
The CG4100 is a high-throughput instrument for 32-nm process production and 22-nm process development which was designed to meet the measurement needs of the latest generation of double patterning techniques.文件
无文件
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HITACHI
CG4100
类别
CD-SEM
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
112963
晶圆尺寸：
12"/300mm
年份：
2011
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说明
Hitachi CG4100 tool配置
无配置OEM 型号描述
The CG4100 is a high-throughput instrument for 32-nm process production and 22-nm process development which was designed to meet the measurement needs of the latest generation of double patterning techniques.文件
无文件