说明
CD-SEM配置
Software Version:35.47 Resolution:1.8nm Throughput:42wafer/hOEM 型号描述
The CG4100 is a high-throughput instrument for 32-nm process production and 22-nm process development which was designed to meet the measurement needs of the latest generation of double patterning techniques.文件
无文件
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HITACHI
CG4100
类别
CD-SEM
上次验证： 4 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
156936
晶圆尺寸：
12"/300mm
年份：
2013
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
CD-SEM配置
Software Version:35.47 Resolution:1.8nm Throughput:42wafer/hOEM 型号描述
The CG4100 is a high-throughput instrument for 32-nm process production and 22-nm process development which was designed to meet the measurement needs of the latest generation of double patterning techniques.文件
无文件