We value your privacy
We and our selected partners use cookies to enhance your browsing experience, serve personalized content, and analyze our traffic. By clicking "Accept All", you consent to our use of cookies. 阅读更多
说明
FEB Length measurement Many missing parts配置
-Process: High-resolution FEB length measuring device -SMIF Interface: None Overall Specifications -Wafer Size: Supports 8-inch wafers (SEMI standard) -Length measurement method: Cursor and line profile method -Range: 0.1μm～10μm -Reproducibility: 1% ± or 5 nm (3σ), whichever is greater -throughput: Continuous measurement: 20 sheets/hour (5-point measurement/6-inch wafer) -Secondary electron image resolution: 5nm (50Å) (accelerating voltage 0.8kV, TV integrated image) -Usage magnification: × approx. 110 (optical microscope image) ×1,000~150,000(SEM image) -Measurement mode: Automatic measurement with auto-address/image recognition, manual measurement -stage Travel range: X,Y 0~200mm -drive Pulse Motor -control Computer Control Positioning control by linear encoder -Drive speed Up to 50 mm/s Loader -Between the loader room ⇒ the stage Automatic vacuum evacuation followed automatic loading Automatic wafer chuck -Wafer carrier ⇒ loader chamber Cassette to cassette autoloader (26 sheets) Inside the load lock: Electrostatic adsorption method -Cassette to cassette autoloader -method Random access type. 2 cassettes -Chucking Wafer backside vacuum adsorption -Orifura Alignment Automatic detection and adjustment by optical sensor -Electron optics -Accelerating voltage 700~1300V(10V variable) -Lens system Electromagnetic convergent lens system, FCM objective lens -Objective lens aperture: Heated thin film movable diaphragm (4-hole switching by outside vacuum) can be finely -adjusted -Scanning coil Two-stage electromagnetic deflection -Astigmatism 8-pole electromagnetic system (X, Y) -Probe Current Monitor Built-in Faraday cup with automatic length measurement function -optical microscope 1.2mm square field of view Black and white image, with CCD camera Control and display system CRT for observation and control EWS(GUI) 19-inch type, integrating image display Display of wafer maps, measurement values, stage coordinates, etc. for computer interaction Scanning Mode Built-in TV scanning, auto brightness, and contrast record Photography equipment (optional) Safeguards With emergency shut-off switch (mushroom-shaped) Length measurement data processing system File saving function 500MB hard disk for system programs 3.5" F/D driver, 3.5" magneto-optical disk driver With various condition file saving function -data processing Mean, standard deviation, maximum/minimum value -Print output with 80-digit thermal printer -Vacuum exhaust system method: Fully automatic dry clean method vacuum pump: 3 ion pumps 2 turbomolecular pumps 2 rotary pumps -Safeguards With power failure/vacuum safety Size: -Main unit 1650(W)×1890(D)×1650(H) -Control unit 600(W)×1331(D)×1800(H) -Power supply section 535(W)×600(D)×1500(H) -Rotary pump 360(W)×640(D)×520(H) -power 100V, 5kVA, 60Hz (single phase) Environmental conditions magnetic field AC power synchronization frequency component 0.3μT or less DC magnetic field fluctuation: 0.1μT or less vibration Frequency 5Hz Amplitude (peak-to-peak) 3μm noise 75dB or less (C characteristics) room temperature 20～25℃(Δt=±2℃)OEM 型号描述
High-resolution critical-dimension measurement scanning electron microscopes (CD-SEMs)文件
无文件
类似上架物品
查看全部
HITACHI
S-8840
类别
CD-SEM
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
118612
晶圆尺寸：
8"/200mm
年份：
1997
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
FEB Length measurement Many missing parts配置
-Process: High-resolution FEB length measuring device -SMIF Interface: None Overall Specifications -Wafer Size: Supports 8-inch wafers (SEMI standard) -Length measurement method: Cursor and line profile method -Range: 0.1μm～10μm -Reproducibility: 1% ± or 5 nm (3σ), whichever is greater -throughput: Continuous measurement: 20 sheets/hour (5-point measurement/6-inch wafer) -Secondary electron image resolution: 5nm (50Å) (accelerating voltage 0.8kV, TV integrated image) -Usage magnification: × approx. 110 (optical microscope image) ×1,000~150,000(SEM image) -Measurement mode: Automatic measurement with auto-address/image recognition, manual measurement -stage Travel range: X,Y 0~200mm -drive Pulse Motor -control Computer Control Positioning control by linear encoder -Drive speed Up to 50 mm/s Loader -Between the loader room ⇒ the stage Automatic vacuum evacuation followed automatic loading Automatic wafer chuck -Wafer carrier ⇒ loader chamber Cassette to cassette autoloader (26 sheets) Inside the load lock: Electrostatic adsorption method -Cassette to cassette autoloader -method Random access type. 2 cassettes -Chucking Wafer backside vacuum adsorption -Orifura Alignment Automatic detection and adjustment by optical sensor -Electron optics -Accelerating voltage 700~1300V(10V variable) -Lens system Electromagnetic convergent lens system, FCM objective lens -Objective lens aperture: Heated thin film movable diaphragm (4-hole switching by outside vacuum) can be finely -adjusted -Scanning coil Two-stage electromagnetic deflection -Astigmatism 8-pole electromagnetic system (X, Y) -Probe Current Monitor Built-in Faraday cup with automatic length measurement function -optical microscope 1.2mm square field of view Black and white image, with CCD camera Control and display system CRT for observation and control EWS(GUI) 19-inch type, integrating image display Display of wafer maps, measurement values, stage coordinates, etc. for computer interaction Scanning Mode Built-in TV scanning, auto brightness, and contrast record Photography equipment (optional) Safeguards With emergency shut-off switch (mushroom-shaped) Length measurement data processing system File saving function 500MB hard disk for system programs 3.5" F/D driver, 3.5" magneto-optical disk driver With various condition file saving function -data processing Mean, standard deviation, maximum/minimum value -Print output with 80-digit thermal printer -Vacuum exhaust system method: Fully automatic dry clean method vacuum pump: 3 ion pumps 2 turbomolecular pumps 2 rotary pumps -Safeguards With power failure/vacuum safety Size: -Main unit 1650(W)×1890(D)×1650(H) -Control unit 600(W)×1331(D)×1800(H) -Power supply section 535(W)×600(D)×1500(H) -Rotary pump 360(W)×640(D)×520(H) -power 100V, 5kVA, 60Hz (single phase) Environmental conditions magnetic field AC power synchronization frequency component 0.3μT or less DC magnetic field fluctuation: 0.1μT or less vibration Frequency 5Hz Amplitude (peak-to-peak) 3μm noise 75dB or less (C characteristics) room temperature 20～25℃(Δt=±2℃)OEM 型号描述
High-resolution critical-dimension measurement scanning electron microscopes (CD-SEMs)文件
无文件