说明
Cluster Spin Coater System配置
configured for 97mm disk, 380V, 3ph, 60Hz, w/ coater module, thermal module w/ 2ea hotplates, 1ea chillplate, 2ea vacuum plate; alignment module. Includes: media storage tank; Julabo F30-CL recirculating chiller; Thermo Neslab RTE7 recirculating chiller, power cabinet; manuals. 50in x 48in x 80in H.OEM 型号描述
Priming + Spin Coating + Spray Coating + Baking + Development up to 200 mm文件
无文件
类别
Coaters & Developers
上次验证： 昨天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
147628
晶圆尺寸：
未知
年份：
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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GAMMA
类别
Coaters & Developers
上次验证： 昨天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
147628
晶圆尺寸：
未知
年份：
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Cluster Spin Coater System配置
configured for 97mm disk, 380V, 3ph, 60Hz, w/ coater module, thermal module w/ 2ea hotplates, 1ea chillplate, 2ea vacuum plate; alignment module. Includes: media storage tank; Julabo F30-CL recirculating chiller; Thermo Neslab RTE7 recirculating chiller, power cabinet; manuals. 50in x 48in x 80in H.OEM 型号描述
Priming + Spin Coating + Spray Coating + Baking + Development up to 200 mm文件
无文件