说明

1. Inline ：Nikon in-line 2. Pump ： RRC 8 Pellet 3. Main Controller ： Type3 4. Spin Motor type： Panasonic 5. Chemical supplier ：ADH local ， Solvents/Dev CSS 6. T/H controller ： 2 tower model ：

配置

无配置

OEM 型号描述

The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.