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说明
1. Inline ：Nikon in-line 2. Pump ： RRC 8 Pellet 3. Main Controller ： Type3 4. Spin Motor type： Panasonic 5. Chemical supplier ：ADH local ， Solvents/Dev CSS 6. T/H controller ： 2 tower model ：配置
无配置OEM 型号描述
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.文件
PREFERRED
SELLER
类别
Coaters & Developers
上次验证： 23 天前
Buyer pays 12% premium of final sale price
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
128403
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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PREFERRED
SELLER
TEL / TOKYO ELECTRON
ACT 12
类别
Coaters & Developers
上次验证： 23 天前
Buyer pays 12% premium of final sale price
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
128403
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available