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TEL ACT 12 (RH) ➢ Direction: RIGHT HAND SIDE ➢ Slam Stand Alone Track ➢ 2 Wafer Transfer Robot Arms: 1 Carrier, 1 Process ➢ 3 FOUP Loader Port ➢ SECS/GEM I/II Interface required is iUSC ➢ 2 SOG Coater Process Station 2 SOG Nozzles w/ Temperature Control 4 Solvent Capability TARC Compatible: Teflon Coated Chamber PTI Mass Flow Exhaust Controller Temperature Humidity Control 1 Set of SS Back Rinse and Cup Rinse Nozzles ➢ 4 Chill Plate Process Station ➢ 1 Transfer Chill Plate Process Station ➢ 3 Transfer Low Temperature Hot Plate (LHP) ➢ 6 High Temp Hot Plate Process Stations (HHP) ➢ 1 TEL Temperature and Humidity Controller ➢ Side Chemical Cabinet 8 – 2.5 L Bottle Storage Capacity 4 – 2.5 L Bottle Storage Capacity 4 – 12 L Tank Solvent Canisters ➢ 1 AC Power BoxOEM 型号描述
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.文件
类别
Coaters & Developers
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled / Crated
产品编号：
100271
晶圆尺寸：
12"/300mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
ACT 12
类别
Coaters & Developers
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled / Crated
产品编号：
100271
晶圆尺寸：
12"/300mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available