说明
Coater/developer parts tool配置
Known issues: No hot plate Chemical box 3-port loader Type 4 main controller / spin driver PCB PRB with (Qty 2) coaters SMC INR-244-244U-240 temperature control unit Power rack (Qty 2) AC power boxes: 50 A / 150 AOEM 型号描述
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.文件
无文件
类别
Coaters & Developers
上次验证： 今天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
157494
晶圆尺寸：
未知
年份：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
ACT 12
类别
Coaters & Developers
上次验证： 今天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
157494
晶圆尺寸：
未知
年份：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Coater/developer parts tool配置
Known issues: No hot plate Chemical box 3-port loader Type 4 main controller / spin driver PCB PRB with (Qty 2) coaters SMC INR-244-244U-240 temperature control unit Power rack (Qty 2) AC power boxes: 50 A / 150 AOEM 型号描述
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.文件
无文件