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TEL / TOKYO ELECTRON ACT 12
    说明
    无说明
    配置
    TEL Clean Track ACT 12 Single Block with 1Coat + 2Develop + 1Interface
    OEM 型号描述
    The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.
    文件

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    TEL / TOKYO ELECTRON

    ACT 12

    verified-listing-icon

    已验证

    类别
    Coaters & Developers

    上次验证: 60 多天前

    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    84799


    晶圆尺寸:

    12"/300mm


    年份:

    1998


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    TEL / TOKYO ELECTRON ACT 12

    TEL / TOKYO ELECTRON

    ACT 12

    Coaters & Developers
    年份: 0状况: 二手
    上次验证60 多天前

    TEL / TOKYO ELECTRON

    ACT 12

    verified-listing-icon
    已验证
    类别
    Coaters & Developers
    上次验证: 60 多天前
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    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    84799


    晶圆尺寸:

    12"/300mm


    年份:

    1998


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    说明
    无说明
    配置
    TEL Clean Track ACT 12 Single Block with 1Coat + 2Develop + 1Interface
    OEM 型号描述
    The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.
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