
说明
无说明配置
无配置OEM 型号描述
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.文件
无文件
类似上架物品
查看全部PREFERRED
SELLER
KLA
SP1 DLS
类别
Defect Inspection
上次验证: 60 多天前
Buyer pays 12% premium of final sale price
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
112639
晶圆尺寸:
12"/300mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
无配置OEM 型号描述
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.文件
无文件