
说明
Wafer Count (Lifetime) - 108,422配置
Gas Layout: SF6 H2 CHF3 CF4 and C4F8 He O2OEM 型号描述
Omega Synapse etch process module uses a high density plasma source and is designed to etch strongly bonded materials.文件
无文件
类别
Dry / Plasma Etch
上次验证: 7 天前
物品主要详细信息
状况:
Used
运行状况:
Installed / Idle
产品编号:
153992
晶圆尺寸:
6"/150mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
OMEGA SYNAPSE
类别
Dry / Plasma Etch
上次验证: 7 天前
物品主要详细信息
状况:
Used
运行状况:
Installed / Idle
产品编号:
153992
晶圆尺寸:
6"/150mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Wafer Count (Lifetime) - 108,422配置
Gas Layout: SF6 H2 CHF3 CF4 and C4F8 He O2OEM 型号描述
Omega Synapse etch process module uses a high density plasma source and is designed to etch strongly bonded materials.文件
无文件