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Host console- 125*300*210 cm/1500 Nameplate- NE-950EXt Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition- Normal, no missing parts Damage description- None Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2 Current- Three-phase five-wire 208V/120A配置
无配置OEM 型号描述
未提供文件
无文件
ULVAC
NE-950EX
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
79016
晶圆尺寸：
未知
年份：
2010
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说明
Host console- 125*300*210 cm/1500 Nameplate- NE-950EXt Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition- Normal, no missing parts Damage description- None Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2 Current- Three-phase five-wire 208V/120A配置
无配置OEM 型号描述
未提供文件
无文件