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Host console- 125*300*210 cm/1500 NameplateNE-950 Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition- Damaged, no missing parts Damage description- The Turbo pump is severely damaged and cannot be repaired, and the vacuum transfer arm is damaged. Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2, BCl3 Current- Three-phase five-wire 208V/120A配置
无配置OEM 型号描述
未提供文件
无文件
ULVAC
NE-950
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
79021
晶圆尺寸：
12"/300mm
年份：
未知
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说明
Host console- 125*300*210 cm/1500 NameplateNE-950 Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition- Damaged, no missing parts Damage description- The Turbo pump is severely damaged and cannot be repaired, and the vacuum transfer arm is damaged. Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2, BCl3 Current- Three-phase five-wire 208V/120A配置
无配置OEM 型号描述
未提供文件
无文件