说明
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Poly 1 Description: Diffusion（Amorphous Anneal, ɑ-Si） Manufacturer: TEL Model: FORMULA S/W Version 2.0 Configuration: < Basic Configuration > Thoroughput: 50 wafers in Batch Temperature: 850℃ Gas Unit: PH3 1% ,F2, H2, O2 , System Controller: WAVES/Model780 Heater: Mid-Temp VCM-50-XXX Exhaust Controller: CKD VEC EXH Box: Standard Type (190 cm width ) Dry Pump: Exclude < Gas Configuration > Gas Pressure Flow Connection Type Gas Box P-N2 0.5MPa 92 L/min φ1/4”UJR 1%PH3/He 0.2MPa 5 L/min φ1/4”UJR H2 0.2MPa 5 L/min φ1/4”UJR O2 0.2MPa 5 L/min φ1/4”UJR F2 0.2MPa 5 L/min φ1/4”UJR EXH Box P-N2 - - φ3/4”SWG P-N2 - - φ1/2”SWG P-N2 - - φ1/2”SWG D-N2 - - φ3/8”SWG D-N2 - - φ3/8”SWG D-N2 - - φ1/4”SWG Vacuum 20KPa - φ3/8”SWG RCU P-N2 0.7MPa 1200 L/Min φ3/4”SWG D-N2 0.7MPa - φ1/4”SWG P-N2 - - φ3/4”SWG P-N2 - - φ1/2”SWG P-N2 - - φ1/2”SWG D-N2 - - φ3/8”SWG D-N2 - - φ3/8”SWG D-N2 - - φ1/4”SWG Pump D-N2 0.7MPa - φ1/4”SWG D-N2 0.7MPa 110 L/min φ1/2”SWGOEM 型号描述
TELFORMULA is an advanced thermal processing system designed for the production of 65 to 45-nm-node-generation devices and beyond. It offers a reasonable Cost of Ownership (CoO), a short cycle time, and significantly improved process performance. Some of its key features include an ultra-clean, all-quartz reactor, state-of-the-art heater element technology, high-speed wafer-transfer robotics, and in-situ dry gas cleaning technology. TELFORMULA has a wide range of applications, including radical oxidation (LPRO), ultra-thin gate dielectrics formation (oxidation, nitridation), LPCVD (supporting Poly, Sin, SiO2 / Dry gas cleaning), ultra-low temperature LPCVD, and high-k film formation (AIO, HfO, AIO / HfO, HfSiO). With its advanced technology and versatile capabilities, TELFORMULA is an optimal choice for thermal processing in the semiconductor industry.文件
类别
Furnaces / Diffusion
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
129313
晶圆尺寸：
12"/300mm
年份：
2009
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
TELFORMULA
类别
Furnaces / Diffusion
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
129313
晶圆尺寸：
12"/300mm
年份：
2009
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available