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说明
160 kVe, plasma shower, direct drive, cell V6, Solaris, SDS gas box, installed, tested but never run mass production配置
无配置OEM 型号描述
The Eaton/Axcelis GSD 200 is a high current implanter that can handle wafers up to 8 inches in size and has a maximum energy of 180KeV. It is part of the GSD platform, which is known for being the longest manufactured and supported batch ion implanter in the industry. Ion implantation, the technology used by this machine, involves bombarding ionized species into the first atomic layers of a solid to introduce different species into a substrate. This process can change the chemical or tribological properties of the surface, such as hardness, wear resistance, resistance to chemical attack, and reduced friction. It can also improve the oxidation resistance of coatings by forming a dense Al2O3 scale. This technology is widely used in micro-electronics, optics, bio-materials, and doped semiconductor materials.文件
无文件
AXCELIS
GSD 200
类别
High Current
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
125693
晶圆尺寸：
6"/150mm
年份：
未知
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说明
160 kVe, plasma shower, direct drive, cell V6, Solaris, SDS gas box, installed, tested but never run mass production配置
无配置OEM 型号描述
The Eaton/Axcelis GSD 200 is a high current implanter that can handle wafers up to 8 inches in size and has a maximum energy of 180KeV. It is part of the GSD platform, which is known for being the longest manufactured and supported batch ion implanter in the industry. Ion implantation, the technology used by this machine, involves bombarding ionized species into the first atomic layers of a solid to introduce different species into a substrate. This process can change the chemical or tribological properties of the surface, such as hardness, wear resistance, resistance to chemical attack, and reduced friction. It can also improve the oxidation resistance of coatings by forming a dense Al2O3 scale. This technology is widely used in micro-electronics, optics, bio-materials, and doped semiconductor materials.文件
无文件