说明
High Current Implanter Exterior Dimensions Width 119.291 in (303.0 cm) Depth 204.331 in (519.0 cm) Height 112.992 in (287.0 cm) Weight 31,481 lb (14,280 kg)配置
无配置OEM 型号描述
The GSD/200E2 is a 200mm standard high current implanter with a maximum energy of 180KeV. It offers reliable, high productivity and exceptional product control with unmatched cost of ownership. It meets advanced manufacturing requirements through the 180nm node and maintains high throughput for quad implants used for trench doping. It features an Extended Life Source, a Xenon-based Plasma Electron Flood, and real-time dose control for consistent low doses.文件
无文件
AXCELIS
GSD 200E2
类别
High Current
上次验证： 4 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
147417
晶圆尺寸：
未知
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
High Current Implanter Exterior Dimensions Width 119.291 in (303.0 cm) Depth 204.331 in (519.0 cm) Height 112.992 in (287.0 cm) Weight 31,481 lb (14,280 kg)配置
无配置OEM 型号描述
The GSD/200E2 is a 200mm standard high current implanter with a maximum energy of 180KeV. It offers reliable, high productivity and exceptional product control with unmatched cost of ownership. It meets advanced manufacturing requirements through the 180nm node and maintains high throughput for quad implants used for trench doping. It features an Extended Life Source, a Xenon-based Plasma Electron Flood, and real-time dose control for consistent low doses.文件
无文件