说明
VARIAN EHP500 MEDIUM CURRENT SYSTEM WITH OPTIONS (PEA605)配置
Software Version - V13.43.29 CIM - GEM and SECS Process - Medium Current Implanter Handler System - Endstation PP+ with both Loadlock Excluded Lock Lock Rough LHS & RHS LPT Analyzer Turbo Pump & Controller Endstation 2 stage pump Target cryo CT10 IHS and RHS LL turbo pump Source Rough pump Source Turbo pump and controller Beamline turbo pump and controllerOEM 型号描述
The E500-EHP is a medium current ion implanter made by AMAT (Varian). It processes one or two cassettes of wafers as a batch, a single wafer at a time.文件
类别
Medium Current
上次验证： 30 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
150920
晶圆尺寸：
8"/200mm
年份：
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
类似上架物品
查看全部
APPLIED MATERIALS (AMAT) / VARIAN
E500-EHP
类别
Medium Current
上次验证： 30 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
150920
晶圆尺寸：
8"/200mm
年份：
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available