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Currently Configured for 300mm Wafer Size Can be config for 200mm SMIF x 2 as option Handler: 300mm Dual FOUP Robot: Brooks PRI ATM407 Chuck Type: 300mm VacuumOEM 型号描述
The Archer 10XT is an Automated Optical Overlay Metrology product that enables control of overlay error budget for sub-90-nm production. It provides a significant increase in throughput, precision, and TIS variability over previous generation systems. The system is user-friendly and has a competitive cost-of-ownership for 300-mm manufacturing at the sub-90-nm node. It integrates with KLA-Tencor’s software management products to provide comprehensive optical overlay metrology process control.文件
类别
Overlay
上次验证： 60 多天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
77166
晶圆尺寸：
12"/300mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
ARCHER 10 XT
类别
Overlay
上次验证： 60 多天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
77166
晶圆尺寸：
12"/300mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available