说明
Metrology / inspection system配置
Main Unit (Qty 2) SMIF Factory Interface Robot Unit Process: OVERLAY MEASUREMENT CIM: SECSOEM 型号描述
The Archer 10XT is an Automated Optical Overlay Metrology product that enables control of overlay error budget for sub-90-nm production. It provides a significant increase in throughput, precision, and TIS variability over previous generation systems. The system is user-friendly and has a competitive cost-of-ownership for 300-mm manufacturing at the sub-90-nm node. It integrates with KLA-Tencor’s software management products to provide comprehensive optical overlay metrology process control.文件
无文件
类别
Overlay
上次验证： 6 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
154815
晶圆尺寸：
8"/200mm
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
ARCHER 10 XT
类别
Overlay
上次验证： 6 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
154815
晶圆尺寸：
8"/200mm
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Metrology / inspection system配置
Main Unit (Qty 2) SMIF Factory Interface Robot Unit Process: OVERLAY MEASUREMENT CIM: SECSOEM 型号描述
The Archer 10XT is an Automated Optical Overlay Metrology product that enables control of overlay error budget for sub-90-nm production. It provides a significant increase in throughput, precision, and TIS variability over previous generation systems. The system is user-friendly and has a competitive cost-of-ownership for 300-mm manufacturing at the sub-90-nm node. It integrates with KLA-Tencor’s software management products to provide comprehensive optical overlay metrology process control.文件
无文件