说明
PECVD配置
[Chamber A] Process: P-TEOS/TMP Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300), TMP(60) RPU: 400kHz/3000W HRF: 13.56MHz/1000W LRF: 430kHz/1000W [Chamber B] Process: P-TEOS/TMP Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300), TMP(60) RPU: 400kHz/3000W HRF: 13.56MHz/1000W LRF: 430kHz/1000W [Chamber C] Process: P-TEOS/TMP Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300), TMP(60) RPU: 400kHz/3000W HRF: 13.56MHz/1000W LRF: 430kHz/1000WOEM 型号描述
The Eagle is a single-wafer processing product platform for PECVD applications. The Eagle 12 is for 300mm wafers.文件
ASM
EAGLE 12
已验证
类别
PECVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
35057
晶圆尺寸：
12"/300mm
年份：
2013
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ASM
EAGLE 12
类别
PECVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
35057
晶圆尺寸：
12"/300mm
年份：
2013
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available