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说明
HIGH RESOLUTION PROFILOMETER,CU配置
无配置OEM 型号描述
KLA-Tencor HRP 340 is among the most production worthy metrology solutions in 300mm segment, supporting the most advanced applications including: etch, CMP, and C4 bump monitoring, and more. The 340 series configurations are designed to meet cost, performance, and automation requirements and can be configured as a single open cassette, or dual FIMS for stringent particle requirements. The system utilizes KLA-Tencor's proprietary UltraLite sensor technology for maintaining constant tip-sample forces and vertical linearity over the full Z range. The HRP 340 features a configurable piezo flexure sensor stage for high resolution scans.文件
无文件
KLA
HRP-340
类别
Profiler
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
92893
晶圆尺寸：
未知
年份：
未知
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Refurbishment Services
Available
说明
HIGH RESOLUTION PROFILOMETER,CU配置
无配置OEM 型号描述
KLA-Tencor HRP 340 is among the most production worthy metrology solutions in 300mm segment, supporting the most advanced applications including: etch, CMP, and C4 bump monitoring, and more. The 340 series configurations are designed to meet cost, performance, and automation requirements and can be configured as a single open cassette, or dual FIMS for stringent particle requirements. The system utilizes KLA-Tencor's proprietary UltraLite sensor technology for maintaining constant tip-sample forces and vertical linearity over the full Z range. The HRP 340 features a configurable piezo flexure sensor stage for high resolution scans.文件
无文件