说明
AlCu & Ti sputter deposition cluster tool配置
Platform: Brooks MX800 Process capability: AlCu / Ti (HIS-Modul) / degas / soft etch Peripherals: (Qty 2) Edwards L70 (Qty 2) Brooks CTI 9600 Upgraded from 6” to 8” in 2008 HIS-Module upgrade in 2021, incl. Artic chiller (-20 °C) I/O boards upgraded in 2021 Software upgraded in 2021 Turbo pumps replaced on loadlocks in 2021 Documentation available (incl. upgrade features)OEM 型号描述
未提供文件
无文件
类别
PVD / Sputtering
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
154591
晶圆尺寸：
8"/200mm
年份：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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EVATEC / UNAXIS / OERLIKON / BALZERS
CLUSTERLINE 200
类别
PVD / Sputtering
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
154591
晶圆尺寸：
8"/200mm
年份：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
AlCu & Ti sputter deposition cluster tool配置
Platform: Brooks MX800 Process capability: AlCu / Ti (HIS-Modul) / degas / soft etch Peripherals: (Qty 2) Edwards L70 (Qty 2) Brooks CTI 9600 Upgraded from 6” to 8” in 2008 HIS-Module upgrade in 2021, incl. Artic chiller (-20 °C) I/O boards upgraded in 2021 Software upgraded in 2021 Turbo pumps replaced on loadlocks in 2021 Documentation available (incl. upgrade features)OEM 型号描述
未提供文件
无文件