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Field Emission Scanning Electron Microscope配置
Performance (FE-SEM) Image resolution : 1.0nm at 15kV : 1.4nm at 1kV Accelerating voltage : 0.5 to 30kV Magnification : LM mode 20x to 2,000x : HM mode 100x to 800,000x Sample Stage (Type I) Movement : X: 50mm, Y: 50mm , Z: 1.5 ~ 30mm Tilt: -5° ~ +70°, Rotation : 360° Sample size : 100mm (Max) Sample holder : 25mm Sample exchange : Airrock type Stage drive : X,Y,Z,T,R - 5-axis Fully Motorized Electron Optics Electron Gun : Cold field emission source (Life time : minimum 5 years) Lens System : 3-stage electromagnetic lens Objective apergure : 4-opennings, selectable & alignable from outside the vacuum Stigmator : Electromagnetic octapole type Scanning coil : 2-stage electromagnetic deflection Display System Imaging signal : Secondary Electron Image (SEI) Display : 19 inch viewing (TFT LCD Monitor x1ea) Frame memory : 640 X 480, 1,280 X 960, 2,560x1,920, 5,120x3,840 pixels Image processing : Auto image Brightness control Auto image Contrast control Dynamic stigmator monitor Electrical image shift: ±12um (W/D = 8mm) Auto data display : Number, Accelating voltage, magnification, micron bar Windows : Window XP Vacuum Control System : Full automatic, pneumatic valve control Ultimate vacuum : Electron gun (10-7 Pa) Sample chamber (10-4 Pa) Vacuum pump : IP x 1 : 60L/s IP x 2 : 20L/x IP-3 : 7 × 10-5 Pa or better Turbomolecular Pump (300 l/s) x 1ea Rotary pump (133 l/min) x 1ea Vacuum gauge : Sample chamber (Penning gauge) Exchange chamber (Pirani gauge)OEM 型号描述
Field Emission Scanning Electron Microscope文件
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HITACHI
S-4800 II
类别
SEM / FIB
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
109972
晶圆尺寸：
未知
年份：
2004
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