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说明
ANALYTICAL EQUIPMENT配置
Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.4nm (1kV, WD=1.5mm, Deceleration mode) 2.0nm (1kV, WD-1.5mm, Normal mode) Magnification: LM mode: 20 ~ 2,000X HM mode: 100 ~ 800,000X Specimen Stage: Stage Motorization: 5 axis motorized Type II: X: 0 ~ 110mm; Y: 0 ~ 110mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg. Operating System: Windows XP Professional Options: 1. Joystick for stage control 2. CD Measurement Function 3. RS-232C 4. Deceleration function 5. Video Amplifier unit 6. 200mm load lock (upgrade from 150mm)OEM 型号描述
Field Emission Scanning Electron Microscope文件
无文件
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HITACHI
S-4800 II
类别
SEM / FIB
上次验证： 60 多天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
23573
晶圆尺寸：
8"/200mm
年份：
2004
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说明
ANALYTICAL EQUIPMENT配置
Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.4nm (1kV, WD=1.5mm, Deceleration mode) 2.0nm (1kV, WD-1.5mm, Normal mode) Magnification: LM mode: 20 ~ 2,000X HM mode: 100 ~ 800,000X Specimen Stage: Stage Motorization: 5 axis motorized Type II: X: 0 ~ 110mm; Y: 0 ~ 110mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg. Operating System: Windows XP Professional Options: 1. Joystick for stage control 2. CD Measurement Function 3. RS-232C 4. Deceleration function 5. Video Amplifier unit 6. 200mm load lock (upgrade from 150mm)OEM 型号描述
Field Emission Scanning Electron Microscope文件
无文件