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NIKON NSR-S204B
  • NIKON NSR-S204B
  • NIKON NSR-S204B
  • NIKON NSR-S204B
  • NIKON NSR-S204B
  • NIKON NSR-S204B
  • NIKON NSR-S204B
  • NIKON NSR-S204B
  • NIKON NSR-S204B
  • NIKON NSR-S204B
说明
无说明
配置
Gigaphoton laser 1) Original temperature: 23° 2) Original Altitude normal pressure: 755mmHg 3) Lens type: Nikon standard 4) Rack type: Right Type 5) Wafer Carrier Table: Left 6) Reticle Library: Center 7) Main unit with 0.68 NA (Auto Variable , SHRINC Conventional) Sigma 0.75 8) Pellicle reticle loader (PRL) YES 9) System for 6” reticle 6 Inch (NON-SMIF) 10) 25mm X 33mm field size YES 11) LSA system YES 12) FIA l//system YES 13) Illumination model: (Conventional, Annular,) 14) 8” wafer loader (WL Type-3), 8”ceramic holder, Flat ZONE: In 6 O'clock FLAT Type 8Inch 15) Pellicle reticle detector YES 16) BMU Type Standard 17) Pre-alignment non contact pre-alignment: Non Contact 18) Chip leveling YES 19) NEMA Box YES 20) Tool software MCSV : 3.44 21) Laser Type Giga Photon 22) Chamber Type Asahi N5Z1102 (2000.02)
OEM 型号描述
The system offers a resolution of 150 nm or better with a numerical aperture (NA) of 0.68. It utilizes a KrF excimer laser with a wavelength of 248 nm as the exposure light source. The reduction ratio is 1:4, and the exposure field measures 25 × 33 mm. The alignment accuracy, using the EGA method with |M| + 3σ, is equal to or less than 35 nm.
文件

无文件

类别
Steppers & Scanners

上次验证: 60 多天前

物品主要详细信息

状况:

Used


运行状况:

未知


产品编号:

111988


晶圆尺寸:

未知


年份:

未知


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

NIKON

NSR-S204B

verified-listing-icon
已验证
类别
Steppers & Scanners
上次验证: 60 多天前
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listing-photo-39972f07736d4272a0725aea0d0045b9-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/44629/39972f07736d4272a0725aea0d0045b9/3770f372195b49959ea8b28ca20718db_55dc0873b0fa472fa2ed65e1bb2c04cd_mw.jpeg
listing-photo-39972f07736d4272a0725aea0d0045b9-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/44629/39972f07736d4272a0725aea0d0045b9/a2a9101c3a364af7bbc116745b8bf5d7_fe93aaa239cd45adbe3fc60df282136045005c_mw.jpeg
物品主要详细信息

状况:

Used


运行状况:

未知


产品编号:

111988


晶圆尺寸:

未知


年份:

未知


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明
配置
Gigaphoton laser 1) Original temperature: 23° 2) Original Altitude normal pressure: 755mmHg 3) Lens type: Nikon standard 4) Rack type: Right Type 5) Wafer Carrier Table: Left 6) Reticle Library: Center 7) Main unit with 0.68 NA (Auto Variable , SHRINC Conventional) Sigma 0.75 8) Pellicle reticle loader (PRL) YES 9) System for 6” reticle 6 Inch (NON-SMIF) 10) 25mm X 33mm field size YES 11) LSA system YES 12) FIA l//system YES 13) Illumination model: (Conventional, Annular,) 14) 8” wafer loader (WL Type-3), 8”ceramic holder, Flat ZONE: In 6 O'clock FLAT Type 8Inch 15) Pellicle reticle detector YES 16) BMU Type Standard 17) Pre-alignment non contact pre-alignment: Non Contact 18) Chip leveling YES 19) NEMA Box YES 20) Tool software MCSV : 3.44 21) Laser Type Giga Photon 22) Chamber Type Asahi N5Z1102 (2000.02)
OEM 型号描述
The system offers a resolution of 150 nm or better with a numerical aperture (NA) of 0.68. It utilizes a KrF excimer laser with a wavelength of 248 nm as the exposure light source. The reduction ratio is 1:4, and the exposure field measures 25 × 33 mm. The alignment accuracy, using the EGA method with |M| + 3σ, is equal to or less than 35 nm.
文件

无文件