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NIKON NSR-S204B
  • NIKON NSR-S204B
  • NIKON NSR-S204B
  • NIKON NSR-S204B
  • NIKON NSR-S204B
  • NIKON NSR-S204B
  • NIKON NSR-S204B
  • NIKON NSR-S204B
  • NIKON NSR-S204B
  • NIKON NSR-S204B
说明
无说明
配置
Configuration Requirement Original temperature: 23° Original Altitude normal pressure: 755mmHg Lens type: Nikon standard Rack type: Right Type Wafer Carrier Table: Left Reticle Library: Center Main unit with 0.68 NA (Auto Variable , SHRINC Conventional) Sigma 0.75 Pellicle reticle loader (PRL) YES System for 6” reticle 6 Inch (NON-SMIF) 25mm X 33mm field size YES LSA system YES FIA l//system YES Illumination model: (Conventional, Annular,) 8” wafer loader (WL Type-3), 8”ceramic holder, Flat ZONE: In 6 O'clock FLAT Type 8Inch Pellicle reticle detector YES BMU Type Standard Pre-alignment non contact pre-alignment Non Contact Chip leveling YES NEMA Box YES Tool software MCSV : 3.44 Laser Type Giga Photon Chamber Type Asahi N5Z1102 (2000.02)
OEM 型号描述
The system offers a resolution of 150 nm or better with a numerical aperture (NA) of 0.68. It utilizes a KrF excimer laser with a wavelength of 248 nm as the exposure light source. The reduction ratio is 1:4, and the exposure field measures 25 × 33 mm. The alignment accuracy, using the EGA method with |M| + 3σ, is equal to or less than 35 nm.
文件
类别
Steppers & Scanners

上次验证: 60 多天前

物品主要详细信息

状况:

Used


运行状况:

未知


产品编号:

118460


晶圆尺寸:

未知


年份:

未知


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

NIKON

NSR-S204B

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已验证
类别
Steppers & Scanners
上次验证: 60 多天前
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listing-photo-45a764ccac944f2cb6188d98522f4eee-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1099/45a764ccac944f2cb6188d98522f4eee/d7328450b0414449aaf92d49139179a6_nikons204bconfigurationsn_mw.jpg
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listing-photo-45a764ccac944f2cb6188d98522f4eee-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1099/45a764ccac944f2cb6188d98522f4eee/ea4e3e00f1d3442194b2c523d359ad16_nikons204bconfigurationsn_mw.jpg
listing-photo-45a764ccac944f2cb6188d98522f4eee-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1099/45a764ccac944f2cb6188d98522f4eee/8c902948f2994b2d96be77aa10b0ad23_nikons204bconfigurationsn_mw.jpg
物品主要详细信息

状况:

Used


运行状况:

未知


产品编号:

118460


晶圆尺寸:

未知


年份:

未知


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明
配置
Configuration Requirement Original temperature: 23° Original Altitude normal pressure: 755mmHg Lens type: Nikon standard Rack type: Right Type Wafer Carrier Table: Left Reticle Library: Center Main unit with 0.68 NA (Auto Variable , SHRINC Conventional) Sigma 0.75 Pellicle reticle loader (PRL) YES System for 6” reticle 6 Inch (NON-SMIF) 25mm X 33mm field size YES LSA system YES FIA l//system YES Illumination model: (Conventional, Annular,) 8” wafer loader (WL Type-3), 8”ceramic holder, Flat ZONE: In 6 O'clock FLAT Type 8Inch Pellicle reticle detector YES BMU Type Standard Pre-alignment non contact pre-alignment Non Contact Chip leveling YES NEMA Box YES Tool software MCSV : 3.44 Laser Type Giga Photon Chamber Type Asahi N5Z1102 (2000.02)
OEM 型号描述
The system offers a resolution of 150 nm or better with a numerical aperture (NA) of 0.68. It utilizes a KrF excimer laser with a wavelength of 248 nm as the exposure light source. The reduction ratio is 1:4, and the exposure field measures 25 × 33 mm. The alignment accuracy, using the EGA method with |M| + 3σ, is equal to or less than 35 nm.
文件