说明
1. Electrical power: 400VAC, 3P+N, 32A, 50/60Hz, 63A 2. 300mm load port x2 (Asyst ISO port) 3. Brooks DBM 2406 dual arm robot 4. Wafer flip station x2 for wafer backside processing or front side processing 5. 300mm wafer process chamber x4 6. 300mm standard chuck x4 (to be confirmed) 7. FFU and Ion systems 8. CDS: integrated chemical cabinets x2 9. Med1 - Dual inline heater - Equipped with Honda ultrasonic flow meters - Last ran production with HF-acetic acid, 60C 10. Med2 - Buffer PZ10 spiking pump - Paddle wheel - Dual Inline heater - Cooling unit - Equipped with Honda ultrasonic flow meters - Last ran production with poly etch (HF:HNO3), 25C 11. Original manufacturer manual soft copy 12. Original hard disks with software at time of de-installation配置
无配置OEM 型号描述
The DV-34BF is part of the Da Vinci Series, a single-wafer processing technology platform designed for high-volume manufacturing. It addresses new cleaning requirements for polymer removal and backside etch and clean, providing high-throughput and accurate wafer cleaning to maximize device yields. The four-chamber system performs a wide range of back-and frontside processes on 300 mm wafers and is optimized for emerging technologies such as high-k dielectrics, new metal gates, and non-volatile memory devices. It offers optimized process performance, high throughput, minimized footprint, advanced handling, reduced media consumption, flexible chemistry application, higher reliability, resulting in low CoO.文件
LAM RESEARCH / SEZ
DV-34BF
已验证
类别
Wet Etch
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled / Uncrated
产品编号：
111940
晶圆尺寸：
未知
年份：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / SEZ
DV-34BF
类别
Wet Etch
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled / Uncrated
产品编号：
111940
晶圆尺寸：
未知
年份：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available