说明
Asset Description - TRF6 SEZ SP-223 POST ETCH POLYMER REMOVAL F067PE0599M0X04 Software Version - 4.0.7 CIM - SEC GEM Process - POST ETCH POLYMER REMOVAL配置
System Type Description Quantity Status Handler System Single wafer process 1 OK Factory Interface SMIF 4 OK Options System CDS 3 OK Main System main unit 1 OK Others NA 0OEM 型号描述
The SEZ 223 is a spin-processing system designed for high throughput cleaning and film removal applications for semiconductor wafer processing. It has a robot that transports 200mm wafers from four cassettes to two identical process chambers, capable of applying up to three chemicals each. The system has an object-oriented software architecture with a Sematech compliant GUI and Touch Screen. It also has options like Offline process editor, Mini-Environment, DIW-Ozone Processing, SMIF, AGV, Frontside handling, Film Removal End Point Detection, and more. It supports applications such as Copper Backside & Wraparound Clean, Other Backside Metal Cleans, Backside Film Removal, Wafer Reclaim, Post-etch Polymer Removal, Oxide Etching, and Post-CMP-Cleaning.文件
类别
Wet Etch
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
137323
晶圆尺寸：
8"/200mm
年份：
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / SEZ
SP223
类别
Wet Etch
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
137323
晶圆尺寸：
8"/200mm
年份：
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available