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说明
Single Wafer Processing配置
Currently Configured for: 300mm Current Equipment Status: Available Available date: Currently Available The equipment use of destructive methods to deinstallation the equipment. Damage/Missing parts list, please inspect tool to reconfirm. Dry pumps and customer provided items not included on sales. Inspect to confirm configuration and condition. The DC Power supply is missing and Heater is damaged. Install Type is Stand-Alone Date of last PM is 2014 The system not On-Line SEZ Spin Processor Model is SP304 UI (Front) is present Status Lamp is present Chuck Size (Left) is 12 Chuck Size (Right) is 12 Ionizer system No Flip Module No End Point Detection System Horiba concentration Monitor (HF Monitor) ULPA Filter (Top of Main Unit) FFU Replacement Date is 2013 Robot Support Plate is Present Robot - CNTRL Filter Replacement Date is 2013 Suck Back Box w/NT flow meter & manual reset Number of Load-ports is 2 std Load-port Size (Left) is 12 Load-port Size (Right) is 12 No Load-port Adapters (12->8) No Wafer ID Reader No RFID Reader Chemical Module 1 is SC1 Chemical Module 2 is HF 49% Chemical Module 3 is H2SO4 Chemical Delivery System (CDS) is CDS Buffer System for Chemical Cabinet No Bulk Chem Delivery system (BCD)_Active No Bulk Chem Delivery system (BCD)_Passive All Cables are present There are missing or damaged partsOEM 型号描述
The SEZ SP304 is a single chamber system that can handle up to three chemicals. It is compatible with both 200mm and 300mm wafer sizes.文件
无文件
类别
Wet Etch
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
48207
晶圆尺寸：
12"/300mm
年份：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH / SEZ
SP304
类别
Wet Etch
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
48207
晶圆尺寸：
12"/300mm
年份：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Single Wafer Processing配置
Currently Configured for: 300mm Current Equipment Status: Available Available date: Currently Available The equipment use of destructive methods to deinstallation the equipment. Damage/Missing parts list, please inspect tool to reconfirm. Dry pumps and customer provided items not included on sales. Inspect to confirm configuration and condition. The DC Power supply is missing and Heater is damaged. Install Type is Stand-Alone Date of last PM is 2014 The system not On-Line SEZ Spin Processor Model is SP304 UI (Front) is present Status Lamp is present Chuck Size (Left) is 12 Chuck Size (Right) is 12 Ionizer system No Flip Module No End Point Detection System Horiba concentration Monitor (HF Monitor) ULPA Filter (Top of Main Unit) FFU Replacement Date is 2013 Robot Support Plate is Present Robot - CNTRL Filter Replacement Date is 2013 Suck Back Box w/NT flow meter & manual reset Number of Load-ports is 2 std Load-port Size (Left) is 12 Load-port Size (Right) is 12 No Load-port Adapters (12->8) No Wafer ID Reader No RFID Reader Chemical Module 1 is SC1 Chemical Module 2 is HF 49% Chemical Module 3 is H2SO4 Chemical Delivery System (CDS) is CDS Buffer System for Chemical Cabinet No Bulk Chem Delivery system (BCD)_Active No Bulk Chem Delivery system (BCD)_Passive All Cables are present There are missing or damaged partsOEM 型号描述
The SEZ SP304 is a single chamber system that can handle up to three chemicals. It is compatible with both 200mm and 300mm wafer sizes.文件
无文件