说明
无说明配置
the system was configured by LAM to allow the chemicals to be pumped up to the cabinets (intermediate tanks for all three media - see photos) and the attached flow plan (no return pumps in the cabinet!). Inline heater for media and DI Main unit: 12-inch system with handler/gripper with flip option; Pinchuck Intermediate tanks with Trebor pumps Levitronix flow meters for heater flow sometimes cause problems FFU was converted to a different controller/fan (see photos) Chemistry cabinets: Cabinet 1: Main tank (40L) with buffer tank and buffer function Cabinet 2: Main tank (40L) with buffer tank and buffer function Cabinet 3: Pre-tank with 3 paddlewheels/counter and mix pump and main tank (40L) with buffer tank and buffer function The chemistry computer motherboard was replaced with a different one A weld on the drain in Chemistry Cabinet 3 was repairedOEM 型号描述
The SEZ SP304 is a single chamber system that can handle up to three chemicals. It is compatible with both 200mm and 300mm wafer sizes.文件
类别
Wet Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
125813
晶圆尺寸：
6"/150mm, 12"/300mm
年份：
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH / SEZ
SP304
类别
Wet Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
125813
晶圆尺寸：
6"/150mm, 12"/300mm
年份：
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available